디스플레이 진공열처리제어 장비,디스플레이 진공냉각챔버,진공열처리챔버

[Coreonix]

엠티에스코리아

james9790@daum.net

031 499 9790

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“이 공정은 엠티에스코리아가 제일 잘합니다”

대면적 글라스 진공 냉각 챔버 (Large-Area Glass Vacuum Cooling Chamber System)

[Single-chamber type, Dual-chamber type]

[2G~8.6G]

-표준 진공 열처리 시스템

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-시스템개요

•고온 글라스를 열처리 진공챔버 환경에서 안정적으로 이송·냉각하여

글라스 표면 산화 방지 및 파티클·오염 최소화 그리고  균일하게 목표 온도로 냉각하는데 있다

-System

• Overall Size: 2000 (L) × 3000 (W) × 3068 (H) mm,  3200(L) × 4410(W) × 3100(H) mm
• Glass Size: 1500 mm × 925 mm, 2290 mm × 2620 mm
• Thickness: 0.4 ~ 0.7 t

-Vacuum Chamber

• Dimensions: 1740(W) × 2000(L) × 280(H) mm , 3150(W) × 3200(L) × 400(H) mm
• Glass Size: 1500 × 925 mm, 2290 mm × 2620 mm
• Glass Thickness: 0.4 ~ 0.7 t
• Processing Capacity: 1 sheet per cycle

-Cooling Stage

• Material: Aluminum & SUS 30t~40t
• Cooling System: Internal cooling water line (25 °C)
• Pin Up/Down mechanism
• Built-in 4-point temperature sensors + glass surface temperature monitoring sensor
• 4-side glass edge line clamping function
• Alignment function included
• Maintenance convenience

-Vacuum Pump

• Configuration: Dry pump only
• Capacity: 3000 ~ 6000 L/min (oil-free)
• Target Vacuum Level: ≤ 5 Pa

-N₂ Utility

• Purge: Prevent oxidation and remove residual gases before/after process
• Backfill: Return to atmospheric pressure during unloading/docking release to protect pump and glass

-Control System

• PLC-based control (valves, sensors, pump interlocking)
• Real-time temperature/pressure monitoring and data logging

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-표준 열처리 시스템

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