삼성전자 투과율 88% EUV 펠리클 개발…핵심부품 내재화

<p><a href="https://news.zum.com/articles/80632333" target="_blank" class="ke-link">https://news.zum.com/articles/80632333</a></p><div class="figure-open" contenteditable="false" data-ke-type="opengraph" data-ke-align="alignCenter" data-og-type="website" data-og-title="삼성전자 투과율 88% EUV 펠리클 개발…핵심부품 내재화" data-og-description="삼성전자가 극자외선[EUV] 노광 공정 핵심 부품으로 꼽히는 `펠리클`의 국산화에 다가섰다. 투과율 88% 펠리클을 자체 기술로 개발하는 데 성공했다." data-og-host="news.zum.com" data-og-source-url="https://news.zum.com/articles/80632333" data-og-url="https://news.zum.com/articles/80632333" data-og-image="https://scrap.kakaocdn.net/dn/bTHpw9/hyReJGr5A7/yOfr88dMVGUk9we1RjhSzK/img.jpg?width=400&height=250&face=0_0_400_250,https://scrap.kakaocdn.net/dn/OthFT/hyRfHG3iGv/CI9CnhUmwpeixvnxRsecEk/img.jpg?width=1000&height=667&face=0_0_1000_667,https://scrap.kakaocdn.net/dn/GHobC/hyReMXqJ4t/JXNkqp2wQAX5QFMohS9zvk/img.jpg?width=530&height=392&face=0_0_530_392"><a href="https://news.zum.com/articles/80632333" target="_blank" data-source-url="https://news.zum.com/articles/80632333"><div class="og-image" style="background-image:url(https://scrap.kakaocdn.net/dn/bTHpw9/hyReJGr5A7/yOfr88dMVGUk9we1RjhSzK/img.jpg?width=400&height=250&face=0_0_400_250,https://scrap.kakaocdn.net/dn/OthFT/hyRfHG3iGv/CI9CnhUmwpeixvnxRsecEk/img.jpg?width=1000&height=667&face=0_0_1000_667,https://scrap.kakaocdn.net/dn/GHobC/hyReMXqJ4t/JXNkqp2wQAX5QFMohS9zvk/img.jpg?width=530&height=392&face=0_0_530_392)"></div><div class="og-text"><p class="og-title">삼성전자 투과율 88% EUV 펠리클 개발…핵심부품 내재화</p><p class="og-desc">삼성전자가 극자외선[EUV] 노광 공정 핵심 부품으로 꼽히는 `펠리클`의 국산화에 다가섰다. 투과율 88% 펠리클을 자체 기술로 개발하는 데 성공했다.</p><p class="og-host">news.zum.com</p></div></a></div><p> </p>