﻿Shimadzu Turbo Pump Mag-Lev—LM/LMC Series Specification

<P>Shimadzu Mag-Lev—LM/LMC Series </P> <DIV class=highslide-gallery> <DIV id=photo_1><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/photo/Photo-PU-SHIMADZUPICTURE.jpg"><IMG title=Photo-PU-SHIMADZUPICTURE.jpg border=0 alt="Click to view Photo-PU-SHIMADZUPICTURE.jpg" align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fjpg%2Fphoto%2FPhoto-PU-SHIMADZUPICTURE.jpg" height=150></A> <DIV class=highslide-caption>Photo-PU-SHIMADZUPICTURE.jpg </DIV></DIV> <P><IMG style="MARGIN-LEFT: 50px" border=0 src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2Fgif%2Ficon_enlarge.gif"></P></DIV> <P>Shimadzu's unique line of turbo molecular pumps combines the advantages of the high pumping speed associated with the turbo pump and the high foreline pressure acceptance of the drag pump. This unique blending of technologies results in a pump with much higher compression ratios than conventional turbo pumps, up to 10<SUP>11</SUP> for N<SUB>2</SUB>; and for some versions extends the fore-vacuum tolerance up to 30 Torr. </P> <P>Their complete lack of hydrocarbon vapor, their reliability, their ability to accept particulate-laden gases, and their corrosion resistance are necessary requirements in the semiconductor process industry. </P> <H3>Features:</H3> <UL> <LI>Lubricant-free, magnetically levitated rotor bearings make them completely oil-free when backed by a dry pump</LI> <LI>High foreline pressure tolerance gives them the ability to work with lower cost dry mechanical pumps</LI> <LI>Low pump profile designs for easy mounting</LI> <LI>High compression ratios for all gases</LI> <LI>Interactive rotor balancing ensures maximum uptime</LI> <LI>Self-tuning cables and frequency converters for ease of use</LI> <LI>Use extensively in applications requiring oil-free, ultra-clean, and ultrahigh vacuums (corrosion-resistant version can also be used in corrosive gas production environments)</LI> <LI>Chemical series available for corrosive applications (LMC models)</LI></UL> <H3>Applications:</H3> <UL> <LI>Mass spectrometry</LI> <LI>SIMS</LI> <LI>Electron microscopy</LI> <LI>Surface science and analysis</LI> <LI>Special ultra-clean leak detection</LI> <LI>Particle accelerators</LI> <LI>Space simulation experiments</LI> <LI>Oxygen plasma etching processes</LI> <LI>Implant tools for semiconductor processes</LI></UL> <H3><FONT size=2></FONT> </H3> <P> </P> <H3>Specifications Table</H3> <P> <TABLE class=tradeshow cellPadding=3> <TBODY> <TR class=techheading align=center> <TD class=bigwhite>Pump Model</TD> <TD class=bigwhite noWrap>Pumping<BR>Speed<BR>L/sec (cfm)</TD> <TD class=bigwhite noWrap>Compression<BR>Ratios</TD> <TD class=bigwhite noWrap>Ult. Pressure<BR>Torr (mBar)</TD> <TD class=bigwhite noWrap>Inlet<BR>Flange</TD> <TD class=bigwhite noWrap>Foreline<BR>Flange</TD> <TD class=bigwhite noWrap>Max. Foreline<BR>Press.<BR>Torr (mbar)</TD> <TD class=bigwhite noWrap>Backing Pump Min.<BR>Speed - CFM (m3/hr)</TD> <TD class=bigwhite noWrap>Orientation</TD> <TD class=bigwhite noWrap>Cooling Method</TD> <TD class=bigwhite noWrap>Weight<BR>lbs (kg)</TD></TR> <TR> <TD class=bigwhite noWrap>203LM/LMC</TD> <TD noWrap> <CENTER>190</CENTER></TD> <TD noWrap> <CENTER>N<SUB>2</SUB>: 1.0 x 10<SUP>9</SUP><BR>He: 6.0 x 10<SUP>4</SUP><BR>H<SUB>2</SUB>: 4.0 x 10<SUP>3</SUP></CENTER></TD> <TD noWrap> <CENTER>1 x 10<SUP>-10</SUP><BR>(1.3 x 10<SUP>-10</SUP>)</CENTER></TD> <TD noWrap> <CENTER>ISO100-K or 6" CF</CENTER></TD> <TD noWrap> <CENTER>KF25</CENTER></TD> <TD noWrap> <CENTER>4 (5.3)</CENTER></TD> <TD noWrap> <CENTER>7 (12)</CENTER></TD> <TD noWrap> <CENTER>Any (360°)</CENTER></TD> <TD noWrap> <CENTER>Water</CENTER></TD> <TD noWrap> <CENTER>19.8 (9)</CENTER></TD></TR> <TR> <TD class=bigwhite noWrap>303LM/LMC</TD> <TD noWrap> <CENTER>320</CENTER></TD> <TD noWrap> <CENTER>N<SUB>2</SUB>: 1.0 x 10<SUP>9</SUP><BR>He: 8.0 x 10<SUP>4</SUP><BR>H<SUB>2</SUB>: 1.0 x 10<SUP>4</SUP></CENTER></TD> <TD noWrap> <CENTER>1 x 10<SUP>-10</SUP><BR>(1.3 x 10<SUP>-10</SUP>)</CENTER></TD> <TD noWrap> <CENTER>ISO100-K or 6" CF</CENTER></TD> <TD noWrap> <CENTER>KF25</CENTER></TD> <TD noWrap> <CENTER>4 (5.3)</CENTER></TD> <TD noWrap> <CENTER>7 (12)</CENTER></TD> <TD noWrap> <CENTER>Any (360°)</CENTER></TD> <TD noWrap> <CENTER>Water</CENTER></TD> <TD noWrap> <CENTER>30.8 (14)</CENTER></TD></TR> <TR> <TD class=bigwhite noWrap>403LM/LMC</TD> <TD noWrap> <CENTER>420</CENTER></TD> <TD noWrap> <CENTER>N<SUB>2</SUB>: 1.0 x 10<SUP>9</SUP><BR>He: 8.0 x 10<SUP>4</SUP><BR>H<SUB>2</SUB>: 1.0 x 10<SUP>4</SUP></CENTER></TD> <TD noWrap> <CENTER>1 x 10<SUP>-10</SUP><BR>(1.3 x 10<SUP>-10</SUP>)</CENTER></TD> <TD noWrap> <CENTER>ISO160-K or 8" CF</CENTER></TD> <TD noWrap> <CENTER>KF25</CENTER></TD> <TD noWrap> <CENTER>4 (5.3)</CENTER></TD> <TD noWrap> <CENTER>7 (12)</CENTER></TD> <TD noWrap> <CENTER>Any (360°)</CENTER></TD> <TD noWrap> <CENTER>Water</CENTER></TD> <TD noWrap> <CENTER>30.8 (14)</CENTER></TD></TR> <TR> <TD class=bigwhite noWrap>803LM/LMC</TD> <TD noWrap> <CENTER>800</CENTER></TD> <TD noWrap> <CENTER>N<SUB>2</SUB>: 1.0 x 10<SUP>9</SUP><BR>He: 8.0 x 10<SUP>4</SUP><BR>H<SUB>2</SUB>: 4.0 x 10<SUP>3</SUP></CENTER></TD> <TD noWrap> <CENTER>1 x 10<SUP>-11</SUP><BR>(1.3 x 10<SUP>-11</SUP>)</CENTER></TD> <TD noWrap> <CENTER>ISO160-K or 8" CF</CENTER></TD> <TD noWrap> <CENTER>KF40</CENTER></TD> <TD noWrap> <CENTER>3 (4)</CENTER></TD> <TD noWrap> <CENTER>17.6 (29.9)</CENTER></TD> <TD noWrap> <CENTER>Any (360°)</CENTER></TD> <TD noWrap> <CENTER>Water</CENTER></TD> <TD noWrap> <CENTER>68.2 (31)</CENTER></TD></TR> <TR> <TD class=bigwhite noWrap>1003LM/LMC</TD> <TD noWrap> <CENTER>1080</CENTER></TD> <TD noWrap> <CENTER>N<SUB>2</SUB>: 1.0 x 10<SUP>9</SUP><BR>He: 8.0 x 10<SUP>4</SUP><BR>H<SUB>2</SUB>: 4.0 x 10<SUP>3</SUP></CENTER></TD> <TD noWrap> <CENTER>1 x 10<SUP>-11</SUP><BR>(1.3 x 10<SUP>-11</SUP>)</CENTER></TD> <TD noWrap> <CENTER>ISO200-F or 10" CF</CENTER></TD> <TD noWrap> <CENTER>KF40</CENTER></TD> <TD noWrap> <CENTER>5 (6.6)</CENTER></TD> <TD noWrap> <CENTER>17.6 (29.9)</CENTER></TD> <TD noWrap> <CENTER>Any (360°)</CENTER></TD> <TD noWrap> <CENTER>Water</CENTER></TD> <TD noWrap> <CENTER>70.4 (32)</CENTER></TD></TR> <TR> <TD class=bigwhite noWrap>2003LM/LMC</TD> <TD noWrap> <CENTER>2000</CENTER></TD> <TD noWrap> <CENTER>N<SUB>2</SUB>: 1.0 x 10<SUP>9</SUP><BR>He: 7.0 x 10<SUP>5</SUP><BR>H<SUB>2</SUB>: 1.4 x 10<SUP>4</SUP></CENTER></TD> <TD noWrap> <CENTER>1 x 10<SUP>-11</SUP><BR>(1.3 x 10<SUP>-11</SUP>)</CENTER></TD> <TD noWrap> <CENTER>ISO250-F or 12" CF</CENTER></TD> <TD noWrap> <CENTER>KF40</CENTER></TD> <TD noWrap> <CENTER>2 (2.6)</CENTER></TD> <TD noWrap> <CENTER>17.6 (29.9)</CENTER></TD> <TD noWrap> <CENTER>Any (360°)</CENTER></TD> <TD noWrap> <CENTER>Water</CENTER></TD> <TD noWrap> <CENTER>121 (55)</CENTER></TD></TR> <TR> <TD class=bigwhite noWrap>3203LM/LMC</TD> <TD noWrap> <CENTER>3200</CENTER></TD> <TD noWrap> <CENTER>N<SUB>2</SUB>: 1.0 x 10<SUP>9</SUP><BR>He: 3.0 x 10<SUP>5</SUP><BR>H<SUB>2</SUB>: 1.0 x 10<SUP>4</SUP></CENTER></TD> <TD noWrap> <CENTER>1 x 10<SUP>-9</SUP><BR>(1.3 x 10<SUP>-9</SUP>)</CENTER></TD> <TD noWrap> <CENTER>ISO320-F</CENTER></TD> <TD noWrap> <CENTER>KF40</CENTER></TD> <TD noWrap> <CENTER>2 (2.6)</CENTER></TD> <TD noWrap> <CENTER>53 (90.1)</CENTER></TD> <TD noWrap> <CENTER>Any (360°)</CENTER></TD> <TD noWrap> <CENTER>Water</CENTER></TD> <TD noWrap> <CENTER>155 (70)</CENTER></TD></TR></TBODY></TABLE><BR></P> <H3>Charts</H3> <DIV class=highslide-gallery> <DIV style="DISPLAY: none" id=chart_1><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-Shimadzu_203LM.jpg"><IMG title="Shimadzu 203LM" border=0 alt="Click to view Shimadzu 203LM" align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fjpg%2Fchart%2FChart-PU-Shimadzu_203LM.jpg" height=100></A> <DIV class=highslide-caption>Shimadzu 203LM </DIV> <P class=bluefont><STRONG>Chart:</STRONG> <SPAN class=blackfont>Shimadzu 203LM</SPAN></P></DIV> <DIV style="DISPLAY: none" id=chart_2><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-SHIMADZU_303LM.jpg"><IMG title="Shimadzu 303LM" border=0 alt="Click to view Shimadzu 303LM" align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fjpg%2Fchart%2FChart-PU-SHIMADZU_303LM.jpg" height=100></A> <DIV class=highslide-caption>Shimadzu 303LM </DIV> <P class=bluefont><STRONG>Chart:</STRONG> <SPAN class=blackfont>Shimadzu 303LM</SPAN></P></DIV> <DIV style="DISPLAY: none" id=chart_3><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-SHIMADZU_403LM.jpg"><IMG title="Shimadzu 403LM" border=0 alt="Click to view Shimadzu 403LM" align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fjpg%2Fchart%2FChart-PU-SHIMADZU_403LM.jpg" height=100></A> <DIV class=highslide-caption>Shimadzu 403LM </DIV> <P class=bluefont><STRONG>Chart:</STRONG> <SPAN class=blackfont>Shimadzu 403LM</SPAN></P></DIV> <DIV style="DISPLAY: none" id=chart_4><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-SHIMADZU_803LM.jpg"><IMG title="Shimadzu 803LM" border=0 alt="Click to view Shimadzu 803LM" align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fjpg%2Fchart%2FChart-PU-SHIMADZU_803LM.jpg" height=100></A> <DIV class=highslide-caption>Shimadzu 803LM </DIV> <P class=bluefont><STRONG>Chart:</STRONG> <SPAN class=blackfont>Shimadzu 803LM</SPAN></P></DIV> <DIV style="DISPLAY: none" id=chart_5><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-SHIMADZU_1003LM.jpg"><IMG title="Shimadzu 1003LM" border=0 alt="Click to view Shimadzu 1003LM" align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fjpg%2Fchart%2FChart-PU-SHIMADZU_1003LM.jpg" height=100></A> <DIV class=highslide-caption>Shimadzu 1003LM </DIV> <P class=bluefont><STRONG>Chart:</STRONG> <SPAN class=blackfont>Shimadzu 1003LM</SPAN></P></DIV> <DIV style="DISPLAY: none" id=chart_6><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-SHIMADZU_2003LM.jpg"><IMG title="Shimadzu 2003LM" border=0 alt="Click to view Shimadzu 2003LM" align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fjpg%2Fchart%2FChart-PU-SHIMADZU_2003LM.jpg" height=100></A> <DIV class=highslide-caption>Shimadzu 2003LM </DIV> <P class=bluefont><STRONG>Chart:</STRONG> <SPAN class=blackfont>Shimadzu 2003LM</SPAN></P></DIV> <DIV style="DISPLAY: block" id=chart_7><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-SHIMADZU_3203LM.jpg"><IMG title="Shimadzu 3203LM" border=0 alt="Click to view Shimadzu 3203LM" align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fjpg%2Fchart%2FChart-PU-SHIMADZU_3203LM.jpg" height=100></A> <DIV class=highslide-caption>Shimadzu 3203LM </DIV> <P class=bluefont><STRONG>Chart:</STRONG> <SPAN class=blackfont>Shimadzu 3203LM</SPAN></P></DIV> <P><IMG style="MARGIN-LEFT: 50px" border=0 src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2Fgif%2Ficon_enlarge.gif"></P> <TABLE class=thumbs border=0 cellPadding=3> <TBODY> <TR> <TD> <DIV ;=""><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-Shimadzu_203LM.jpg"><IMG border=0 align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fthumbnail%2Fchart%2FChart-PU-Shimadzu_203LM-THUMB.jpg" height=40></A> <DIV class=highslide-caption>Shimadzu 203LM </DIV></DIV></TD> <TD> <DIV ;=""><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-SHIMADZU_303LM.jpg"><IMG border=0 align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fthumbnail%2Fchart%2FChart-PU-SHIMADZU_303LM-THUMB.jpg" height=40></A> <DIV class=highslide-caption>Shimadzu 303LM </DIV></DIV></TD> <TD> <DIV ;=""><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-SHIMADZU_403LM.jpg"><IMG border=0 align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fthumbnail%2Fchart%2FChart-PU-SHIMADZU_403LM-THUMB.jpg" height=40></A> <DIV class=highslide-caption>Shimadzu 403LM </DIV></DIV></TD> <TD> <DIV ;=""><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-SHIMADZU_803LM.jpg"><IMG border=0 align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fthumbnail%2Fchart%2FChart-PU-SHIMADZU_803LM-THUMB.jpg" height=40></A> <DIV class=highslide-caption>Shimadzu 803LM </DIV></DIV></TD> <TD> <DIV ;=""><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-SHIMADZU_1003LM.jpg"><IMG border=0 align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fthumbnail%2Fchart%2FChart-PU-SHIMADZU_1003LM-THUMB.jpg" height=40></A> <DIV class=highslide-caption>Shimadzu 1003LM </DIV></DIV></TD> <TD> <DIV ;=""><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-SHIMADZU_2003LM.jpg"><IMG border=0 align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fthumbnail%2Fchart%2FChart-PU-SHIMADZU_2003LM-THUMB.jpg" height=40></A> <DIV class=highslide-caption>Shimadzu 2003LM </DIV></DIV></TD> <TD> <DIV ;=""><A class=highslide href="http://www.lesker.com/newweb/Vacuum_Pumps/jpg/chart/Chart-PU-SHIMADZU_3203LM.jpg"><IMG border=0 align=center src="https://img1.daumcdn.net/relay/cafe/original/?fname=http%3A%2F%2Fwww.lesker.com%2Fnewweb%2FVacuum_Pumps%2Fthumbnail%2Fchart%2FChart-PU-SHIMADZU_3203LM-THUMB.jpg" height=40></A></DIV></TD></TR></TBODY></TABLE></DIV>