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High Intelligent Control Valve
-The HICV Series of self control valves are highly accurate, maintaining a constant rate of outlet
pressure and flow regardless of variations in pressure at the point of entry.
Creation of reliable system
Before the advent of the HICV series, the flow rate was unstable due to pressure fluctuations,
constantly affecting product yield...
The HICV Series valves are highly accurate valves that maintain stable outlet pressure and flow rate, that are not affected by pressure fluctuations on
Before - Ultra high performance valve that and flow rate, independent of inletthe inlet side.
Self Control Valve -HICV POWER
●Liquid-contact surface material is PTFE and PFA. O-rings and metal parts are free from
contact fluid.
●The pressure and flowrate can be maintained at the desired preset value by the setting air
pressure.
●There are no restrictions on installation configurations.
After the advent of the HICV series, stable pressure and flow rate can be maintained,
resulting in the greatly improved product reliability.
(Features, Internal Structure & Operation Principle of the HICV series)
1.Features
All wetted path are made of PTFE or PFA. This valve is appropriate for high purity ultra pure water and high purity chemical which are often used in semiconductor industry.
The HICV Series valves are control valves that maintain stable outlet pressure, that are not
affected by inlet pressure fluctuations.
HICV valve is the control valve which can adjust the pressure of the output by the set air pressure.
Other existing valves are not able to keep constant flow rate when the pressure of input side is not constant, however, it is possible to maintain constant flow rate by using the HICV valve.
The chart on the left shows the HICV control capability.
Pulsation is created by operating the MV-1 manual valve in the lower part of the system to vary
the HICV inlet pressure (P1).
Notice that the HICV's outlet pressure (P2) remains stable, and is not affected by pulsation.
2.Internal Structure and Operation Principle
When the pressure of the input side is increased and the pressure in the chamber is higher than the set air, the diaphragm is pushed upward.
At the same time, the shaft is pull up and the flow path will be narrower.
It will cause the pressure in the chamber to be lower.
On the other hand, when the pressure in the chamber is lower than the pressure of the set air,
the shaft is pushed down and the flow path will be wider.
The shaft of the HICV valve moves up and down to keep the pressure in the chamber (the
pressure of the output) constant. (Self-control)
However, the flow rate varies when any change occurs in the pressure loss on the outlet side.
(Metal parts are free from contact with fluid. And HICV does not have rubbing parts.)
HICV's Effective Application Examples
1. General Use
Once installed, the required quantity can be consistently supplied.
Without the HICV installed, pressure fluctuation in the utility line is large.
This prevents fluids being supplied to the point of use at a constant rate. However,
constant supply cannot be realized by the constant supply pump and pulse damper because pulsation cannot be removed completely.
Once the HICV is installed to the utility line, pressure on the outlet side becomes consistent, regardless of pressure fluctuation on the inlet side, thus the required quantity can be supplied consistently.
This simple combination achieves a high level of control, enhancing equipment performance and accuracy.
(Boiling fluid or air bubbles may adversely affect control.)
2.Changing flow rate externally
Utilizing this characteristic, the amount of fluid supplied to the use point can be adjusted by predetermining the required flow rate and pressure for several locations, and changing the output signal from the sequencer or computer as necessary.
The HICV is capable of not only supplying a fixed amount of fluid but also performing
feedback control for flow rate, pressure, concentration, temperature, etc. While measuring
them. When controlling the flow rate, for instance, the value measured by the flowmeter is
input to the controller, the difference between the actual flow rate and the required flow rate is
calculated, and output is fed back to the HICV via the electro-pneumatic regulator.
3.Ultra pure water and Chemical Fluid Stable Supply
When HICVs are installed in Ultra pure water and chemical fluid utility lines, these can be stably
supplied to the point of use (U.P.) without being affected by mutual interference among points of use.
For example, when there are four points of use, as in the illustration above, the line pressure P1
when only one U.P.is activated is higher than when all four U.P.s are activated, resulting in more
Ultra pure water and chemical fluid than necessary being supplied.
Further, even when all points of use are activated, the pressure of the point of use closest to the
utility supply source is higher. This hampers stable supply of Ultra pure water and chemical fluid to the far end of the utility.
To solve these problems, HICVs are installed at the inlet of each point of use, making pressure on the outlet side constant, regardless of pressure fluctuation on the inlet side.
Ultra pure water and chemical fluid can therefore be supplied stably to the far end of the utility line, resulting in improved utility efficiency.
Moreover, the flow rate at each point of use can be set as desired. This can save unnecessary flow, resulting in a reduction in the total consumption in the plant.
4.Chemical Mixing and Spiking Application
1)Applicable to chemical mixing and H2O2 spiking application
●Dilution of HF
When diluting HF to the desired concentration, install the HICV in the Ultra
pure water line and HF line and set the appropriate mixing rate.
●H2O2 spiking application using the HICV enables supply of a fixed amount of H2O2
when required. Integrating a concentration sensor makes automatic concentration control possible.
Measurement Method
The present data is measured in level tset circuit.
Setting orifice at the lower stream Controlled fluid : Ultra pure water Data is for reference.