Dear Dr. V
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We always appreciate for your kind interest.
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Answers of three questions you made at the third meeting, substituted for attached data.
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Following two facts were finalized after intense discussion about "U"test result.
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Firstly, since our sample seems to have slight T-top, we need to have cross-section profiles and accordingly we will send you the base tuned sample.
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Secondly, the P-ARC you are using is not suitable for our resist concerning fidelity. It might be difficult but please test UMT-3001 again with A-25 of Nasan Co. or 15D of Carant Co.
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Dear Dr. V
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귀하의 노력에 항상 감사를 드립니다.
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3차 meeting에서 요구하셨던 3가지 질문에 대한 답변은 자료로써 대치하고자 합니다.
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금번 U test 결과에 해한 당사 연구원들과 장시간의 meeting 을 실시한 결과, 2가지로 압축되는 사항을 추론할 수 있었습니다.
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첫째는, 당사 semple이 약간의 T-top을 같는 것으로 사료되는바 corss section profile을 받아보았으면 합니다. 이 사진의 결과로부터 base에 의한 차기 샘플 tuning이 가능하리라 사료됩니다.
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둘째는, 귀사가 사용하시는 P-ARC는 당사 레지스트의 fidelity 측면에서 부적합할 것을 사료됩니다. 혹시 어려울 지 모르겠지만, Nasan의 A25 혹은 Carant사의 15D로 U-3001을 재 test 하여 주셨으면 합니다.
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첫댓글We always appreciate your kind interest.근데.. 친절한 흥미? 좀 이상하네요.^^ We guess the attached data can be the answer for your last three requests. (Please refer to them.) ...~ after our intensive discussion on the "U"test result. One is that our sample seems to have slight T-topa and..
it would be nice if we can have cross-section profiles. After the test, we could have better sample tuning for next. The other is that your P-ARC does not seem to be suitable for our resister(??) concerning fidelity.
If you do not mind, please test UMT-3001 again with A-25 from Nasan Co. or with 15D from Carant Co. ~~사의 제품 이란 표현으로..from 이 맞는지.. of가 맞는지 모르겠네요.. 느낌상 전 from을 쓰고 싶네요..
첫댓글 We always appreciate your kind interest.근데.. 친절한 흥미? 좀 이상하네요.^^ We guess the attached data can be the answer for your last three requests. (Please refer to them.) ...~ after our intensive discussion on the "U"test result. One is that our sample seems to have slight T-topa and..
it would be nice if we can have cross-section profiles. After the test, we could have better sample tuning for next. The other is that your P-ARC does not seem to be suitable for our resister(??) concerning fidelity.
If you do not mind, please test UMT-3001 again with A-25 from Nasan Co. or with 15D from Carant Co. ~~사의 제품 이란 표현으로..from 이 맞는지.. of가 맞는지 모르겠네요.. 느낌상 전 from을 쓰고 싶네요..