1) This instrument should be controlled by a Microsoft WindowsTM system and should be shared the data of image files to a PC through network for processing.
2) Comfortable operation should be carried out with Mouse and Keyboard by menu selection.
This suitable processing should be able to acquire the concept of optimized operation.
3) A clear live image and a captured image should be displayed in one LCD 4) All condition of observation should be displayed on CRT monitor and easily saved by a fully automatic computer system. 5) An image analysis software is attached GUI. 6) The fully eucentric stage should be allowed the focus and magnification remain unchanged when the specimen is moved.
2. Description
1) Visual Console
Probe size 3.5㎚(@WD 8㎜)
Acceleration Voltage 0.5KeV ~ 30KeV
Visual Inspection Source Electron induced Display (Tungsten Hair Pin Type)
Probe Current nA ~pA for SEM, Max. ~ 3uA
Magnification 10X ~300,000X
2) Detector High Sensitivity E-T detector.
SE & BSE Image
3) Image Signal process Search (320*240) / Inspection(640*480)/ Photo Mode(1280*960)
4) Working Distance ~ 55 mm (Z-travel)
5) Work-Piece Positioning Tilt : -20~60 degree (max.-30~90 degree)
Rotation 360 degree,
6) Stage Movement Stroke 50x60x55mm X/Y/Z Mechanical Eucentric Function
(Option 3 Axis motorization X/Y/Z)
7) Vacuum system Full Automation (or Manual Mode)
Rubbing : Rotary pump
High vacuum: Diffusion Pump (Option:TMP).
Convection Gauge(Pirani + Penning Gauge)
Vacuum line & Valve System
8) Control Rack PC Environmental Operation
Operating system : WindowsTM (Window 98/2000/XP)
Serial communication: control data interface
9) Display System 19”LCD monitor
Intel Dual CPU Co-Processor 3.0 GHz(minimum)
1GB RAM, Internet Available
Hard Disk : > 250 GB
10) Port : 3 Port (For EDX, WDX, Etc.).
Port Sufficient for all detector & Up-gradation
11) Image Processor & Particle Counter :
BSE Mode Converter Switch(BSE, EDX, ETC.)
1280 X 960 lines single channel video system
Pixel averaging scan/ Photo Scan/ etc.
Color Transformation (Pseudo Color Display)
Histogram,
Frequency Filter
User define Filter
Particle Counter Analysis S/W
3-Dimensional Profiler; Topographic Image
Multi-Focus (Top & Bottom)
Tiling
Measurement (Angle, Area, Horizontal. Vertical, Width, Cross, Box)
Simple Measuring function by using Horizontal Line, Vertical Line,
Diagonal Lines, Boxes, Angle, Area, etc.
AOI (User Define Area of Interest Measurement)
Annotation (Symbol Such Circle, Boxes, Line, Arrowed, Line),
Area Mode for EDX Convert
Image Shift & Image Rotation(Raster Rotation)
Image Compression / Compression Type : BMP, JPEG,
Clipboard Facility
Data Including Magnification, Working Distance, KV & Mark Bar.
Report Designer
Thumbnail Image Display
12) Automatic Control : Auto Brightness/ Contrast
Auto Focus/ Auto stigmator/ etc.
Auto Emission Beam Current
13) Chamber Volume : 242 X 260 X 302mm (W X L X H)
Multi Specimen Holder
|