Leybold MAg 400 Turbomolecular Pump - Used
Typical Applications
All major semiconductor processes such as Etch, CVD and Ion Implantation
Gas analysis systems
Particle accelerators
Electron beam microscopy
Research instruments and systems
Load locks and transfer chambers
Technical Features
Magnetic suspension
Patented KEPLA-COAT?? for rotor and stator to prevent corrosion
Low noise and vibration levels
Installation in any orientation
Optimized corrosion-resistant advanced rotor design
High temperature and high stress tolerance material
Temperature management system (TMS) for etch application
Advantages to the User
Maintenance-free
Optimized vacuum performance
Resistant against corrosive gases and process by-products
Robust against shock-venting
Temperature control for metal etch
No deposition of etch by products due to TMS
사진은 : 신품 사진입니다.
제품 상태 : 매우 양호
가격 : 추후 협의
회신 주소 : yyjung@hotmail.com
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