<![CDATA[
<p style="text-align: start;"><b><span data-ke-size="size18"><span style="color: #ee2323;" data-ke-size="size20">엠티에스코리아</span></span></b></p><p style="text-align: start;"><b><span style="color: #006dd7; background-color: #ffffff;" data-ke-size="size16">james9790@daum.net</span></b></p><p style="text-align: start;"><b><span data-ke-size="size18"><span style="color: #006dd7;" data-ke-size="size16"><span data-ke-size="size18">031 499 9790</span></span></span></b></p><hr data-ke-style="style5"><div class="imagegridblock" data-ke-type="imageGrid"><div class="image-container"><span data-url="https://t1.daumcdn.net/cafeattach/1Z2QS/f388a99bfe40fed98ced7e9e5c78bae962727498" data-origin-width="1247" data-origin-height="862" style="width:50.00%; margin-right: 10px;"><img src="https://t1.daumcdn.net/cafeattach/1Z2QS/f388a99bfe40fed98ced7e9e5c78bae962727498" class="txc-image-grid"></span><span data-url="https://t1.daumcdn.net/cafeattach/1Z2QS/cd339c8326076deb9633a196e0a92c771c5e3f97" data-origin-width="1247" data-origin-height="862" style="width:50.00%; "><img src="https://t1.daumcdn.net/cafeattach/1Z2QS/cd339c8326076deb9633a196e0a92c771c5e3f97" class="txc-image-grid"></span></div></div><hr data-ke-style="style5"><p style="text-align: center;"><span data-ke-size="size26"><b><span style="color: #000000;">"UV IRRADIATOR (Single Type)"</span></b></span></p><p><span style="color: #000000;" data-ke-size="size20"><b>1. 장비 개요 (Equipment Overview)</b></span></p><p><span style="color: #000000;" data-ke-size="size18">본 장비는 <b>반도체 웨이퍼 다이싱(Saw) 공정 후 UV Tape의 접착력을 감소시키기 위해 UV를 조사하는 장비</b>입니다.</span></p><p><span style="color: #000000;" data-ke-size="size18">UV Irradiation을 통해 UV Tape Adhesive를 경화시켜 접착력을 감소시키며 이후 <b>Die Sorter 공정에서 안정적인 Die Pick-Up을 가능하게 하는 장비</b>입니다.</span></p><p style="text-align: left;"><span style="color: #000000;" data-ke-size="size18">본 장비는 <b>Single Station 구조의 단동기 장비</b>로 설계되며 <b>고균일 UV 조사 및 안정적인 Wafer Frame Handling</b>을 특징으로 합니다.</span></p><hr data-ke-style="style1"><p style="text-align: left;"><span style="color: #000000;" data-ke-size="size20"><b>2. 공정 목적</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 65px;" border="1"><tbody><tr style="height: 21px;"><td style="width: 26.3614%; height: 21px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">항목</span></b></span></td><td style="width: 73.6386%; height: 21px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">내용</span></b></span></td></tr><tr style="height: 10px;"><td style="width: 26.3614%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">목적</span></b></span></td><td style="width: 73.6386%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">UV</span></span><span data-ke-size="size18"><span style="color: #000000;"> Tape 접착력 감소</span></span></td></tr><tr style="height: 10px;"><td style="width: 26.3614%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">효과</span></b></span></td><td style="width: 73.6386%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">Die Pick-Up 안정성 향상</span></span></td></tr><tr style="height: 10px;"><td style="width: 26.3614%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">적용 공정</span></b></span></td><td style="width: 73.6386%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">Wafer Saw 이후</span></span></td></tr><tr style="height: 14px;"><td style="width: 26.3614%; height: 14px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">후속 공정</span></b></span></td><td style="width: 73.6386%; height: 14px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">Die Sorter / Pick & Place</span></span></td></tr></tbody></table></div><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size20"><b>3. 장비 구성 (Equipment Configuration)</b> </span></p><p><span style="color: #000000;" data-ke-size="size18"> <b>  3.1) Wafer Loading Stage</b> </span></p><ul style="list-style-type: disc;" data-ke-list-type="disc"><li><span style="color: #000000;" data-ke-size="size18">Wafer Ring Frame 수동 또는 Auto Loading</span></li><li><span style="color: #000000;" data-ke-size="size18">Frame Position Guide</span></li><li><span style="color: #000000;" data-ke-size="size18">Vacuum Stage 고정</span></li></ul><p><span style="color: #000000;" data-ke-size="size18"> <b>  3.2) UV Irradiation Unit</b> </span></p><ul style="list-style-type: disc;" data-ke-list-type="disc"><li><span style="color: #000000;" data-ke-size="size18">High Intensity UV Lamp</span></li><li><span style="color: #000000;" data-ke-size="size18">UV Reflector Chamber</span></li><li><span style="color: #000000;" data-ke-size="size18">Irradiation Uniformity Control</span></li></ul><p><span style="color: #000000;" data-ke-size="size18"><b>  3.3) X-Y Stage System</b></span></p><ul style="list-style-type: disc;" data-ke-list-type="disc"><li><span style="color: #000000;" data-ke-size="size18">UV 조사 균일성 확보</span></li><li><span style="color: #000000;" data-ke-size="size18">Servo Motor 구동</span></li></ul><p><span style="color: #000000;" data-ke-size="size18"><b>  3.4) Control System</b></span></p><ul style="list-style-type: disc;" data-ke-list-type="disc"><li><span style="color: #000000;" data-ke-size="size18">UV 조사 시간 제어</span></li><li><span style="color: #000000;" data-ke-size="size18">Power Control</span></li><li><span style="color: #000000;" data-ke-size="size18">Safety Interlock</span></li></ul><p><span style="color: #000000;" data-ke-size="size18"><b>  3.5) Unloading Stage</b></span></p><ul style="list-style-type: disc;" data-ke-list-type="disc"><li>UV 조사 완료 Frame 배출</li></ul><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size20"><b>4. 주요 기술 사양 (Technical Specifications)</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 139px;" border="1"><tbody><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">항목</span></b></span></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">사양</span></b></span></td></tr><tr style="height: 14px;"><td style="width: 24.9057%; height: 14px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">적용 Wafer Size</span></b></span></td><td style="width: 74.9686%; height: 14px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">6 / 8 / 12 inch</span></span></td></tr><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">Frame Type</span></b></span></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">Standard Wafer Ring Frame</span></span></td></tr><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">UV Wavelength</span></b></span></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">365 nm</span></span></td></tr><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">UV Intensity</span></b></span></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">100~300 mW/cm²</span></span></td></tr><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">Irradiation Time</span></b></span></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">10~60 sec</span></span></td></tr><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">UV Uniformity</span></b></span></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">±5 % 이하</span></span></td></tr><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">Cycle Time</span></b></span></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">15~40 sec</span></span></td></tr><tr style="height: 14px;"><td style="width: 24.9057%; height: 14px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">UV Lamp Type</span></b></span></td><td style="width: 74.9686%; height: 14px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">Mercury Lamp / UV LED</span></span></td></tr><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">Wafer Holding</span></b></span></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">Vacuum Stage</span></span></td></tr><tr style="height: 11px;"><td style="width: 24.9057%; height: 11px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">Motion System</span></b></span></td><td style="width: 74.9686%; height: 11px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">Servo Motor + Ball Screw</span></span></td></tr><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">Control System</span></b></span></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">PLC + Touch Panel</span></span></td></tr><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><span data-ke-size="size18"><b><span style="color: #000000;">Safety</span></b></span></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">Door Interlock / UV Shield</span></span></td></tr></tbody></table></div><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size20"><b>5. 구동 시스템 (Motion System)</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 43px;" border="1"><tbody><tr style="height: 10px;"><td style="width: 24.5283%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Axis</span></b></td><td style="width: 28.5535%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Drive</span></b></td><td style="width: 46.9182%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Stroke</span></b></td></tr><tr style="height: 13px;"><td style="width: 24.5283%; height: 13px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">X Axis</span></b></td><td style="width: 28.5535%; height: 13px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Servo Motor</span></td><td style="width: 46.9182%; height: 13px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">200 mm</span></td></tr><tr style="height: 10px;"><td style="width: 24.5283%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Y Axis</span></b></td><td style="width: 28.5535%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Servo Motor</span></td><td style="width: 46.9182%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">200 mm</span></td></tr><tr style="height: 10px;"><td style="width: 24.5283%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Z Axis</span></b></td><td style="width: 28.5535%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Manual Adjust</span></td><td style="width: 46.9182%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">50</span><span style="color: #000000;" data-ke-size="size18"> mm</span></td></tr></tbody></table></div><p><b><span style="color: #000000;" data-ke-size="size18">  Motion System 특징</span></b></p><ul style="list-style-type: disc;" data-ke-list-type="disc"><li><span style="color: #000000;" data-ke-size="size18">High Precision Linear Guide</span></li><li><span style="color: #000000;" data-ke-size="size18">Low Vibration Structure</span></li><li><span style="color: #000000;" data-ke-size="size18">Uniform UV Irradiation Movement</span></li></ul><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size20"><b>6. UV System</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 71px;" border="1"><tbody><tr style="height: 21px;"><td style="width: 24.5283%; height: 21px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">항목</span></b></td><td style="width: 75.346%; height: 21px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">사양</span></b></td></tr><tr style="height: 10px;"><td style="width: 24.5283%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">UV Lamp</span></b></td><td style="width: 75.346%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">High Pressure Mercury Lamp</span></td></tr><tr style="height: 10px;"><td style="width: 24.5283%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Wavelength</span></b></td><td style="width: 75.346%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">365 nm</span></td></tr><tr style="height: 10px;"><td style="width: 24.5283%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Lamp Power</span></b></td><td style="width: 75.346%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">2~5 kW</span></td></tr><tr style="height: 10px;"><td style="width: 24.5283%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Cooling</span></b></td><td style="width: 75.346%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Air Cooling / Water Cooling</span></td></tr><tr style="height: 10px;"><td style="width: 24.5283%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Irradiation Area</span></b></td><td style="width: 75.346%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Max 300 mm</span></td></tr></tbody></table></div><p><span style="color: #000000;" data-ke-size="size18"><b>  선택 옵션</b></span></p><ul style="list-style-type: disc;" data-ke-list-type="disc"><li><span style="color: #000000;" data-ke-size="size18">UV LED Type (저발열 / 긴 수명)</span></li><li><span style="color: #000000;" data-ke-size="size18">Multi Lamp System</span></li></ul><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size20"><b>7. 장비 성능 (Performance)</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 72px;" border="1"><tbody><tr style="height: 21px;"><td style="width: 24.4025%; height: 21px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">항목</span></b></td><td style="width: 75.4717%; height: 21px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">성능</span></b></td></tr><tr style="height: 10px;"><td style="width: 24.4025%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">UV 조사 균일도</span></b></td><td style="width: 75.4717%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">±5%</span></span></td></tr><tr style="height: 10px;"><td style="width: 24.4025%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Wafer Damage</span></b></td><td style="width: 75.4717%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">없음</span></span></td></tr><tr style="height: 10px;"><td style="width: 24.4025%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Pick Success Rate</span></b></td><td style="width: 75.4717%; height: 10px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">99.5% 이상</span></span></td></tr><tr style="height: 21px;"><td style="width: 24.4025%; height: 21px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">MTBF</span></b></td><td style="width: 75.4717%; height: 21px; text-align: center;"><span data-ke-size="size18"><span style="color: #000000;">20,000 hr</span></span></td></tr></tbody></table></div><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size20"><b>8. 안전 시스템 (Safety System)</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 105px;" border="1"><tbody><tr style="height: 21px;"><td style="height: 21px;"><span style="color: #000000;" data-ke-size="size18">UV Shield Chamber</span></td></tr><tr style="height: 21px;"><td style="height: 21px;"><span style="color: #000000;" data-ke-size="size18">Door Interlock</span></td></tr><tr style="height: 21px;"><td style="height: 21px;"><span style="color: #000000;" data-ke-size="size18">Emergency Stop</span></td></tr><tr style="height: 21px;"><td style="height: 21px;"><span style="color: #000000;" data-ke-size="size18">Overheat Protection</span></td></tr><tr style="height: 21px;"><td style="height: 21px;"><span style="color: #000000;" data-ke-size="size18">UV Leakage Protection</span></td></tr></tbody></table></div><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size20"><b>9. Utility</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 70px;" border="1"><tbody><tr style="height: 21px;"><td style="width: 24.1509%; height: 21px;"><b><span style="color: #000000;" data-ke-size="size18">항목</span></b></td><td style="width: 75.7233%; height: 21px;"><b><span style="color: #000000;" data-ke-size="size18">사양</span></b></td></tr><tr style="height: 10px;"><td style="width: 24.1509%; height: 10px;"><b><span style="color: #000000;" data-ke-size="size18">Power</span></b></td><td style="width: 75.7233%; height: 10px;"><span style="color: #000000;" data-ke-size="size18">AC 220V / 380V</span></td></tr><tr style="height: 10px;"><td style="width: 24.1509%; height: 10px;"><b><span style="color: #000000;" data-ke-size="size18">Air</span></b></td><td style="width: 75.7233%; height: 10px;"><span style="color: #000000;" data-ke-size="size18">0.5 MPa</span></td></tr><tr style="height: 19px;"><td style="width: 24.1509%; height: 19px;"><b><span style="color: #000000;" data-ke-size="size18">Exhaust</span></b></td><td style="width: 75.7233%; height: 19px;"><span style="color: #000000;" data-ke-size="size18">UV Ozone Exhaust</span></td></tr><tr style="height: 10px;"><td style="width: 24.1509%; height: 10px;"><b><span style="color: #000000;" data-ke-size="size18">Cooling</span></b></td><td style="width: 75.7233%; height: 10px;"><span style="color: #000000;" data-ke-size="size18">Air / Water</span></td></tr></tbody></table></div><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size20"><b>10. 장비 외형 (Estimated Footprint)</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 105px;" border="1"><tbody><tr style="height: 21px;"><td style="width: 24.5283%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>항목</b></span></td><td style="width: 75.346%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>크기</b></span></td></tr><tr style="height: 21px;"><td style="width: 24.5283%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Width</b></span></td><td style="width: 75.346%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">1,300 mm</span></td></tr><tr style="height: 21px;"><td style="width: 24.5283%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Depth</b></span></td><td style="width: 75.346%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">900 mm</span></td></tr><tr style="height: 21px;"><td style="width: 24.5283%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Height</b></span></td><td style="width: 75.346%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">1,100 mm</span></td></tr><tr style="height: 21px;"><td style="width: 24.5283%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Weight</b></span></td><td style="width: 75.346%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">약 400 kg</span></td></tr></tbody></table></div><hr data-ke-style="style2"><hr data-ke-style="style5"><p style="text-align: center;"><span style="color: #000000;" data-ke-size="size26"><b>"UV IRRADIATOR (AUTO TYPE)"</b></span></p><p style="text-align: left;"><span style="color: #000000;" data-ke-size="size23"><b>1. 장비 개요 (Equipment Overview)</b></span></p><p style="text-align: left;"><span style="color: #000000;" data-ke-size="size18">본 장비는 Wafer Dicing(Saw) 공정 이후 UV Tape의 접착력을 감소시키기 위해 UV를 조사하는 자동화 장비입니다.</span></p><p style="text-align: left;"><span style="color: #000000;" data-ke-size="size18">UV Tape는 UV 조사 시 Adhesive가 경화되면서 접착력이 약화되며, 이를 통해 Die Sorter 공정에서 안정적인 Die Pick-up을 가능하게 합니다.</span></p><p style="text-align: left;"><span style="color: #000000;" data-ke-size="size18">본 장비는 Loading → UV Irradiation → Unloading 자동 공정으로 구성된 Inline 대응 장비이며 Wafer Ring Frame 기준 자동 이송 및 UV 조사 기능을 제공합니다.</span></p><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size23"><b>2. 공정 Flow</b></span></p><p style="text-align: left;"><span style="color: #000000;" data-ke-size="size18">Saw Machine<br>     ↓<br>Loader<br>     ↓<br>UV Irradiation<br>     ↓<br>Unloader</span></p><p style="text-align: left;"><span style="color: #000000;" data-ke-size="size18">      ↓<br>Die Sorter</span></p><hr data-ke-style="style1"><p style="text-align: left;"><span style="color: #000000;" data-ke-size="size23"><b>3. 장비 구성 (Equipment Configuration)</b> </span></p><p style="text-align: left;"><span style="color: #000000;" data-ke-size="size20"><b>3.1. Loader Unit</b> </span></p><p style="text-align: left;"><span style="color: #000000;" data-ke-size="size18"> Saw 공정 후 Wafer Frame을 자동 공급하는 장치.</span></p><p><span style="color: #000000;" data-ke-size="size20"><b>구성</b></span></p><p><span style="color: #000000;" data-ke-size="size18">  -Magazine Loader (Frame Cassette)</span></p><p><span data-ke-size="size18"><span style="color: #000000;">  -Frame Separation Mechanism</span></span></p><p><span style="color: #000000;" data-ke-size="size18">  -Transfer Robot / Pick & Place</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Alignment Guide</span></p><p><span style="color: #000000;"><b><span data-ke-size="size20"> 기능 </span></b></span></p><p><span style="color: #000000;" data-ke-size="size18">  -Frame 자동 공급</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Frame 방향 정렬</span></p><p><span style="color: #000000;" data-ke-size="size18">  -UV Stage 이송</span></p><p><span style="color: #000000;" data-ke-size="size20"><b>3.2. Transfer System</b> </span></p><p><span style="color: #000000;"> <span data-ke-size="size18">Wafer Frame</span><span data-ke-size="size18">을 UV 조사 위치로 이송</span> </span></p><p><b><span style="color: #000000;" data-ke-size="size20"> 구성 </span></b></p><p><span style="color: #000000;" data-ke-size="size18">  -Linear Conveyor</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Pick & Place Robot</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Servo Motor Drive</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Precision Linear Guide</span></p><p><b><span style="color: #000000;" data-ke-size="size20">특징</span></b></p><p><span style="color: #000000;" data-ke-size="size18">  -Low Vibration</span></p><p><span style="color: #000000;" data-ke-size="size18">  -High Position Accuracy</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Frame Damage 방지 구조</span></p><p><span style="color: #000000;" data-ke-size="size20"><b>3.3. UV Irradiation Unit</b></span></p><p><span style="color: #000000;" data-ke-size="size18">UV Tape 접착력을 감소시키는 핵심 장치</span></p><p><b><span style="color: #000000;" data-ke-size="size20">구성</span></b></p><p><span style="color: #000000;" data-ke-size="size18">  -UV Lamp Module</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Reflector Chamber</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Irradiation Stage</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Cooling System</span></p><p><span data-ke-size="size20"><b><span style="color: #000000;">기능</span></b></span></p><ul style="list-style-type: disc;" data-ke-list-type="disc"><li><span style="color: #000000;" data-ke-size="size18">High Uniformity UV 조사</span></li><li><span style="color: #000000;" data-ke-size="size18">Tape Adhesive 경화</span></li><li><span style="color: #000000;" data-ke-size="size18">Die Pick 안정화</span></li></ul><p><span style="color: #000000;" data-ke-size="size20"><b>3.4. UV Stage</b></span></p><p><span style="color: #000000;" data-ke-size="size18">UV 조사 시 Wafer Frame을 고정하는 장치</span></p><p><span data-ke-size="size20"><b><span style="color: #000000;">구성</span></b></span></p><p><span style="color: #000000;" data-ke-size="size18">  -Vacuum Stage</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Frame Clamp</span></p><p><span style="color: #000000;" data-ke-size="size18">  -X-Y Servo Stage (Optional)</span></p><p><b><span style="color: #000000;" data-ke-size="size20">특징</span></b></p><p><span style="color: #000000;" data-ke-size="size18">  -Wafer Flatness 유지</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Uniform UV Exposure</span></p><p><span style="color: #000000;" data-ke-size="size20"><b>3.5. Unloader Unit</b></span></p><p><span style="color: #000000;" data-ke-size="size18">UV 조사 완료 Frame을 자동 배출</span></p><p><span data-ke-size="size20"><b><span style="color: #000000;">구성</span></b></span></p><p><span style="color: #000000;" data-ke-size="size18">  -Transfer Robot</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Output Magazine</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Buffer Stage</span></p><p><span data-ke-size="size20"><b><span style="color: #000000;">기능</span></b></span></p><p><span style="color: #000000;" data-ke-size="size18">  -Frame 자동 배출</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Sorter 공정 전달</span></p><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size23"><b>4. 주요 기술 사양 (Technical Specifications)</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 150px;" border="1"><tbody><tr style="height: 21px;"><td style="width: 26.9183%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>항목</b></span></td><td style="width: 72.956%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>사양</b></span></td></tr><tr style="height: 10px;"><td style="width: 26.9183%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Wafer Size</b></span></td><td style="width: 72.956%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">6 / 8 / 12 inch</span></td></tr><tr style="height: 10px;"><td style="width: 26.9183%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Frame Type</b></span></td><td style="width: 72.956%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Standard Wafer Ring Frame</span></td></tr><tr style="height: 21px;"><td style="width: 26.9183%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>UV Wavelength</b></span></td><td style="width: 72.956%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">365 nm</span></td></tr><tr style="height: 10px;"><td style="width: 26.9183%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>UV Intensity</b></span></td><td style="width: 72.956%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">100~300 mW/cm²</span></td></tr><tr style="height: 10px;"><td style="width: 26.9183%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Irradiation Time</b></span></td><td style="width: 72.956%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">10~60 sec</span></td></tr><tr style="height: 10px;"><td style="width: 26.9183%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>UV Uniformity</b></span></td><td style="width: 72.956%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">±5 % 이하</span></td></tr><tr style="height: 10px;"><td style="width: 26.9183%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Cycle Time</b></span></td><td style="width: 72.956%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">10~25 sec</span></td></tr><tr style="height: 28px;"><td style="width: 26.9183%; height: 28px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Handling System</b></span></td><td style="width: 72.956%; height: 28px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Robot Pick & Place</span></td></tr><tr style="height: 10px;"><td style="width: 26.9183%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Motion System</b></span></td><td style="width: 72.956%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Servo Motor</span></td></tr><tr style="height: 10px;"><td style="width: 26.9183%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Control System</b></span></td><td style="width: 72.956%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">PLC + Touch Panel</span></td></tr></tbody></table></div><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size23"><b>5. Motion System</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 64px;" border="1"><tbody><tr style="height: 10px;"><td style="width: 26.9182%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Axis</b></span></td><td style="width: 39.6226%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Drive System</b></span></td><td style="width: 33.2076%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Stroke</b></span></td></tr><tr style="height: 10px;"><td style="width: 26.9182%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Loader Pick Axis</b></span></td><td style="width: 39.6226%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Servo Motor</span></td><td style="width: 33.2076%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">300 mm</span></td></tr><tr style="height: 24px;"><td style="width: 26.9182%; height: 24px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Transfer Axis</b></span></td><td style="width: 39.6226%; height: 24px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Linear Motor / Belt</span></td><td style="width: 33.2076%; height: 24px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">600 mm</span></td></tr><tr style="height: 10px;"><td style="width: 26.9182%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>UV Stage X</b></span></td><td style="width: 39.6226%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Servo Motor</span></td><td style="width: 33.2076%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">200 mm</span></td></tr><tr style="height: 10px;"><td style="width: 26.9182%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>UV Stage Y</b></span></td><td style="width: 39.6226%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Servo Motor</span></td><td style="width: 33.2076%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">200 mm</span></td></tr></tbody></table></div><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size23"><b>6. UV System</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 104px;" border="1"><tbody><tr style="height: 21px;"><td style="width: 26.7925%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>항목</b></span></td><td style="width: 73.0818%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>사양</b></span></td></tr><tr style="height: 10px;"><td style="width: 26.7925%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>UV Lamp Type</b></span></td><td style="width: 73.0818%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">High Pressure Mercury Lamp</span></td></tr><tr style="height: 21px;"><td style="width: 26.7925%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Wavelength</b></span></td><td style="width: 73.0818%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">365 nm</span></td></tr><tr style="height: 21px;"><td style="width: 26.7925%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Lamp Power</b></span></td><td style="width: 73.0818%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">2~5 kW</span></td></tr><tr style="height: 10px;"><td style="width: 26.7925%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Cooling System</b></span></td><td style="width: 73.0818%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Air Cooling / Water Cooling</span></td></tr><tr style="height: 21px;"><td style="width: 26.7925%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Irradiation Area</b></span></td><td style="width: 73.0818%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">300 mm</span></td></tr></tbody></table></div><p><span style="color: #000000;" data-ke-size="size18"><b>옵션</b></span></p><p><span style="color: #000000;" data-ke-size="size18">  -UV LED Type</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Dual Lamp System</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Auto Intensity Control</span></p><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size23"><b>7. 장비 성능</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 83px;" border="1"><tbody><tr style="height: 21px;"><td style="width: 28.9308%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>항목</b></span></td><td style="width: 70.9434%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>성능</b></span></td></tr><tr style="height: 21px;"><td style="width: 28.9308%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>UV 조사 균일도</b></span></td><td style="width: 70.9434%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">±5%</span></td></tr><tr style="height: 10px;"><td style="width: 28.9308%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Die Pick Success Rate</b></span></td><td style="width: 70.9434%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">99.5% 이상</span></td></tr><tr style="height: 21px;"><td style="width: 28.9308%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Wafer Damage</b></span></td><td style="width: 70.9434%; height: 21px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">없음</span></td></tr><tr style="height: 10px;"><td style="width: 28.9308%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>MTBF</b></span></td><td style="width: 70.9434%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">20,000 hr 이상</span></td></tr></tbody></table></div><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size23"><b>8. Safety System</b></span></p><p><span style="color: #000000;" data-ke-size="size18">  -UV Shield Chamber</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Door Interlock</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Emergency Stop</span></p><p><span style="color: #000000;" data-ke-size="size18">  -UV Leakage Protection</span></p><p><span style="color: #000000;" data-ke-size="size18">  -Overheat Protection</span></p><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size23"><b>9. Utility</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 61px;" border="1"><tbody><tr style="height: 21px;"><td style="width: 24.9057%; height: 21px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">항목</span></b></td><td style="width: 74.9686%; height: 21px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">사양</span></b></td></tr><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Power</span></b></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">AC 220V / 380V</span></td></tr><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Air</span></b></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">0.5 ~ 0.7 MPa</span></td></tr><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Exhaust</span></b></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Ozone Exhaust</span></td></tr><tr style="height: 10px;"><td style="width: 24.9057%; height: 10px; text-align: center;"><b><span style="color: #000000;" data-ke-size="size18">Cooling</span></b></td><td style="width: 74.9686%; height: 10px; text-align: center;"><span style="color: #000000;" data-ke-size="size18">Air / Water</span></td></tr></tbody></table></div><hr data-ke-style="style1"><p><span style="color: #000000;" data-ke-size="size23"><b>10. 장비 외형 (Footprint)</b> </span></p><div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%;" border="1"><tbody><tr><td style="width: 24.4025%; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>항목</b></span></td><td style="width: 75.4717%; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>크기</b></span></td></tr><tr><td style="width: 24.4025%; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Width</b></span></td><td style="width: 75.4717%; text-align: center;"><span style="color: #000000;" data-ke-size="size18">1400 mm</span></td></tr><tr><td style="width: 24.4025%; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Depth</b></span></td><td style="width: 75.4717%; text-align: center;"><span style="color: #000000;" data-ke-size="size18">1200 mm</span></td></tr><tr><td style="width: 24.4025%; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Height</b></span></td><td style="width: 75.4717%; text-align: center;"><span style="color: #000000;" data-ke-size="size18">1800 mm</span></td></tr><tr><td style="width: 24.4025%; text-align: center;"><span style="color: #000000;" data-ke-size="size18"><b>Weight</b></span></td><td style="width: 75.4717%; text-align: center;"><span style="color: #000000;" data-ke-size="size18">약 800 kg</span></td></tr></tbody></table></div><p> </p>
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🔲 반도체장비
UV IRRADIATOR (Single Type),UV IRRADIATOR (AUTO TYPE)
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