Laser Deflash System

엠티에스코리아james9790@daum.net031 499 9790<hr data-ke-style="style5"> 반도체 패키지 몰딩 후 플래시(Flash) 정밀 제거 솔루션"Laser Deflash System"<div class="imagegridblock" data-ke-type="imageGrid"><div class="image-container"><img src="https://t1.daumcdn.net/cafeattach/1Z2QS/3eff7efc75f9ee4596d5535ad189e0af06c7638d" class="txc-image-grid"><img src="https://t1.daumcdn.net/cafeattach/1Z2QS/29e599a7381ab0eb9a8e135a1a2d4cf38b4f17dc" class="txc-image-grid"></div></div><hr data-ke-style="style5">■ 1.장비 개요본 장비는 반도체 패키지 몰딩(Molding) 공정 후 발생하는 Flash / Burr를 레이저(Laser Ablation) 방식으로 제거하는 자동화 장비이다.기계식 제거 방식과 달리 비접촉 레이저 가공 기술을 적용하여 패키지 손상 없이 Flash를 정밀 제거하며 공정 품질과 생산성을 동시에 향상시킨다.  👉 적용 가능한 패키지  -QFN,BGA,CSP,SOP,LGA,  기타 Mold Package   -불필요한 도금층<ul style="list-style-type: disc;" data-ke-list-type="disc"><li>과도하게 도금된 구리(Cu), 니켈(Ni) 등</li><li>패턴 외부에 남은 금속</li><li>재작업(rework) 시 기존 도금층 제거</li></ul>   [필요한 부분은 남기고, 정밀하게 선택 제거 가능] <hr data-ke-style="style5">■ 2.장비 기본 사양<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 153px;" border="1"><tbody><tr style="height: 24px;"><td style="width: 15.6368%; height: 24px; text-align: center;"> 항목 </td><td style="width: 84.2371%; height: 24px; text-align: center;"> 사양 </td></tr><tr style="height: 18px;"><td style="width: 15.6368%; height: 18px; text-align: center;"> 장비 크기 </td><td style="width: 84.2371%; height: 18px; text-align: center;"> 약 2,000 mm × 1,800 mm × 1,900 mm </td></tr><tr style="height: 10px;"><td style="width: 15.6368%; height: 10px; text-align: center;">장비 중량</td><td style="width: 84.2371%; height: 10px; text-align: center;">약 2,000 ~ 2,500 kg</td></tr><tr style="height: 39px;"><td style="width: 15.6368%; height: 39px; text-align: center;">전원</td><td style="width: 84.2371%; height: 39px; text-align: center;">AC 380V / 3Phase / 50~60Hz</td></tr><tr style="height: 10px;"><td style="width: 15.6368%; height: 10px; text-align: center;">소비 전력</td><td style="width: 84.2371%; height: 10px; text-align: center;">약 12 ~ 18 kW</td></tr><tr style="height: 10px;"><td style="width: 15.6368%; height: 10px; text-align: center;">압축 공기</td><td style="width: 84.2371%; height: 10px; text-align: center;">0.5 ~ 0.7 MPa</td></tr><tr style="height: 12px;"><td style="width: 15.6368%; height: 12px; text-align: center;">생산 능력</td><td style="width: 84.2371%; height: 12px; text-align: center;">2,000 ~ 6,000 UPH</td></tr><tr style="height: 10px;"><td style="width: 15.6368%; height: 10px; text-align: center;">위치 정밀도</td><td style="width: 84.2371%; height: 10px; text-align: center;">±0.02 mm</td></tr><tr style="height: 10px;"><td style="width: 15.6368%; height: 10px; text-align: center;">Laser 방식</td><td style="width: 84.2371%; height: 10px; text-align: center;">UV / YAG Pulse Laser</td></tr><tr style="height: 10px;"><td style="width: 15.6368%; height: 10px; text-align: center;">Laser Power</td><td style="width: 84.2371%; height: 10px; text-align: center;">10 ~ 30 W</td></tr></tbody></table></div><hr data-ke-style="style5">■ 3.공정 흐름<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 482px;" border="1"><tbody><tr><td>Loader</td></tr><tr style="height: 22px;"><td style="height: 22px;">Elevator</td></tr><tr style="height: 22px;"><td style="height: 22px;">Magazine Clamp</td></tr><tr style="height: 22px;"><td style="height: 22px;">Pick Up</td></tr><tr style="height: 22px;"><td style="height: 22px;">Station</td></tr><tr style="height: 22px;"><td style="height: 22px;">Pusher Transfer</td></tr><tr style="height: 22px;"><td style="height: 22px;">Brush Cleaning</td></tr><tr style="height: 22px;"><td style="height: 22px;">Orientation (Vision Inspection)</td></tr><tr style="height: 22px;"><td style="height: 22px;">Index Transfer</td></tr><tr style="height: 22px;"><td style="height: 22px;">Laser Deflash Process</td></tr><tr style="height: 22px;"><td style="height: 22px;">Cleaning</td></tr><tr style="height: 22px;"><td style="height: 22px;">Unloader</td></tr></tbody></table></div><hr data-ke-style="style5">■ 4.시스템 구성<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%;" border="1"><tbody><tr><td>Loader System</td></tr><tr><td>Transfer System</td></tr><tr><td>Vision Alignment System</td></tr><tr><td>Laser Processing System</td></tr><tr><td>Cleaning System</td></tr><tr><td>Unloader System</td></tr><tr><td>Motion Control System</td></tr></tbody></table></div><hr data-ke-style="style5">■ 5.장치 구성   Loader (매거진 로딩 장치)<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 99.2458%; height: 88px;" border="1"><tbody><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">주요 기능</td><td style="width: 38.596%; height: 22px; text-align: center;">구성</td><td style="width: 76.1924%; height: 22px; text-align: center;">모터 사양</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">매거진 장착</td><td style="width: 38.596%; height: 22px; text-align: center;"> Magazine Base </td><td style="width: 76.1924%; height: 22px; text-align: center;">Servo Motor : 400W</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">매거진 감지</td><td style="width: 38.596%; height: 22px; text-align: center;"> Magazine Sensor </td><td style="width: 76.1924%; height: 22px; text-align: center;">Ball Screw Lift 방식</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">자동 공급 준비</td><td style="width: 38.596%; height: 22px; text-align: center;"> Lift Mechanism </td><td style="width: 76.1924%; height: 22px; text-align: center;"> </td></tr></tbody></table></div>   Elevator (매거진 상승 장치)<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 99.2458%; height: 88px;" border="1"><tbody><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">주요 기능</td><td style="width: 38.596%; height: 22px; text-align: center;">구성</td><td style="width: 76.1924%; height: 22px; text-align: center;">모터 사양</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Origin Sensor</td><td style="width: 38.596%; height: 22px; text-align: center;">Ball Screw Lift</td><td style="width: 76.1924%; height: 22px; text-align: center;">Servo Motor : 750W</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Limit Sensor</td><td style="width: 38.596%; height: 22px; text-align: center;">Precision Linear Guide</td><td style="width: 76.1924%; height: 22px; text-align: center;">Ball Screw Ø25 / Lead 10</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Tray Detect Sensor</td><td style="width: 38.596%; height: 22px; text-align: center;"></td><td style="width: 76.1924%; height: 22px; text-align: center;">Stroke 약 300~550 mm</td></tr></tbody></table></div>    Magazine Clamp (매거진 고정 장치)<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 99.2458%; height: 88px;" border="1"><tbody><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">구성</td><td style="width: 38.596%; height: 22px; text-align: center;">구동방식</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Pneumatic Clamp</td><td style="width: 38.596%; height: 22px; text-align: center;">Air Cylinder</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Linear Guide</td><td style="width: 38.596%; height: 22px; text-align: center;">CAM</td></tr></tbody></table></div>   Pick Up Unit (제품 픽업 장치)<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 86px;" border="1"><tbody><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">구성</td><td style="width: 38.596%; height: 22px; text-align: center;">구동방식</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Vacuum Pick Head (PLATE)</td><td style="width: 38.596%; height: 22px; text-align: center;">Servo Motor 100 W</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Z Axis Servo</td><td style="width: 38.596%; height: 22px; text-align: center;">Stroke 약 100 mm</td></tr><tr style="height: 20px;"><td style="width: 29.6696%; height: 20px; text-align: center;">Linear Guide</td><td style="width: 38.596%; height: 20px; text-align: center;">반복 정밀도 ±0.01 mm</td></tr></tbody></table></div>   Work Station (작업 스테이션)<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 86px;" border="1"><tbody><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">구성</td><td style="width: 38.596%; height: 22px; text-align: center;">구동방식</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Precision Plate</td><td style="width: 38.596%; height: 22px; text-align: center;">Servo Motor 100 W</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Vacuum Chuck</td><td style="width: 38.596%; height: 22px; text-align: center;">Stroke 약 50 mm</td></tr><tr style="height: 20px;"><td style="width: 29.6696%; height: 20px; text-align: center;">Alignment Support</td><td style="width: 38.596%; height: 20px; text-align: center;">반복 정밀도 ±0.01 mm</td></tr></tbody></table></div>Pusher Transfer (제품 이송 장치)<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 86px;" border="1"><tbody><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">구성</td><td style="width: 38.596%; height: 22px; text-align: center;">구동방식</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Servo Actuator</td><td style="width: 38.596%; height: 22px; text-align: center;">Servo Motor 200 W</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Linear Guide</td><td style="width: 38.596%; height: 22px; text-align: center;">Stroke 약 400 mm</td></tr><tr style="height: 20px;"><td style="width: 29.6696%; height: 20px; text-align: center;">Rotary Finger</td><td style="width: 38.596%; height: 20px; text-align: center;">반복 정밀도 ±0.01 mm</td></tr></tbody></table></div>Brush Cleaning (먼지 제거 장치)<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 86px;" border="1"><tbody><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">구성</td><td style="width: 38.596%; height: 22px; text-align: center;">구동방식</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Anti Static Brush</td><td style="width: 38.596%; height: 22px; text-align: center;">DC Motor</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Vacuum Suction</td><td style="width: 38.596%; height: 22px; text-align: center;"></td></tr></tbody></table></div>Orientation System (방향 검사 시스템)<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 33.6705%; height: 155px;" border="1"><tbody><tr style="height: 22px;"><td style="width: 100%; height: 22px; text-align: center;">구성</td></tr><tr style="height: 22px;"><td style="width: 100%; height: 22px; text-align: center;">Industrial Camera</td></tr><tr style="height: 22px;"><td style="width: 100%; height: 22px; text-align: center;">LED Ring Light</td></tr><tr style="height: 20px;"><td style="width: 100%; height: 20px; text-align: center;">Image Processing Software</td></tr></tbody></table></div>Index Transfer System (정밀 이송 장치)<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 86px;" border="1"><tbody><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">구성</td><td style="width: 38.596%; height: 22px; text-align: center;">구동방식</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Precision Linear Stage</td><td style="width: 38.596%; height: 22px; text-align: center;">Servo Motor 200 W</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">Linear Guide</td><td style="width: 38.596%; height: 22px; text-align: center;">Stroke 약 400 mm</td></tr><tr style="height: 20px;"><td style="width: 29.6696%; height: 20px; text-align: center;">Servo Drive</td><td style="width: 38.596%; height: 20px; text-align: center;">반복 정밀도 ±0.01 mm</td></tr></tbody></table></div>Laser Processing System (레이저 가공 시스템)<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 100%; height: 124px;" border="1"><tbody><tr style="height: 22px;"><td style="width: 35.4351%; height: 22px; text-align: center;">구성</td><td style="width: 36.1917%; height: 22px; text-align: center;">항목</td><td style="width: 28.2472%; height: 22px; text-align: center;">사양</td></tr><tr style="height: 20px;"><td style="width: 35.4351%; height: 20px; text-align: center;">Laser Source</td><td style="width: 36.1917%; height: 20px; text-align: center;">Laser Type</td><td style="width: 28.2472%; height: 20px; text-align: center;">UV Pulse Laser</td></tr><tr style="height: 22px;"><td style="width: 35.4351%; height: 22px; text-align: center;">Galvo Scanner</td><td style="width: 36.1917%; height: 22px; text-align: center;">Wavelength</td><td style="width: 28.2472%; height: 22px; text-align: center;">355 nm</td></tr><tr style="height: 20px;"><td style="width: 35.4351%; height: 20px; text-align: center;">F-Theta Lens</td><td style="width: 36.1917%; height: 20px; text-align: center;">Laser Power</td><td style="width: 28.2472%; height: 20px; text-align: center;">10 ~ 30 W</td></tr><tr style="height: 20px;"><td style="width: 35.4351%; height: 20px; text-align: center;">Beam Control System</td><td style="width: 36.1917%; height: 20px; text-align: center;">Spot Size</td><td style="width: 28.2472%; height: 20px; text-align: center;">20 ~ 40 µm</td></tr></tbody></table></div>Cleaning System (레이저 후 클리닝)<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 33.6705%; height: 30px;" border="1"><tbody><tr style="height: 10px;"><td style="width: 100%; height: 10px; text-align: center;">구성</td></tr><tr style="height: 10px;"><td style="width: 100%; height: 10px; text-align: center;">Vacuum Dust Collector</td></tr><tr style="height: 10px;"><td style="width: 100%; height: 10px; text-align: center;">Ionizer</td></tr></tbody></table></div>Unloader (제품 언로딩 장치)<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 99.2458%; height: 88px;" border="1"><tbody><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">주요 기능</td><td style="width: 38.596%; height: 22px; text-align: center;">구성</td><td style="width: 76.1924%; height: 22px; text-align: center;">모터 사양</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">매거진 장착</td><td style="width: 38.596%; height: 22px; text-align: center;">Magazine Base</td><td style="width: 76.1924%; height: 22px; text-align: center;">Servo Motor : 400W</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">매거진 감지</td><td style="width: 38.596%; height: 22px; text-align: center;">Magazine Sensor</td><td style="width: 76.1924%; height: 22px; text-align: center;">Ball Screw Lift 방식</td></tr><tr style="height: 22px;"><td style="width: 29.6696%; height: 22px; text-align: center;">자동 공급 준비</td><td style="width: 38.596%; height: 22px; text-align: center;">Lift Mechanism</td><td style="width: 76.1924%; height: 22px; text-align: center;"></td></tr></tbody></table></div> ■ 6.제어 시스템<div class="table-wrap"><table data-ke-type="table" data-ke-align="alignLeft" style="width: 99.2458%; height: 52px;" border="1"><tbody><tr style="height: 22px;"><td style="width: 14.6759%; height: 22px; text-align: center;">PLC</td><td style="width: 33.6405%; height: 22px; text-align: center;">Motion Control</td><td style="width: 35.9362%; height: 22px; text-align: center;">HMI</td><td style="width: 60.2054%; height: 22px; text-align: center;">통신</td></tr><tr><td style="width: 14.6759%; text-align: center;"> Mitsubishi </td><td style="width: 33.6405%; text-align: center;"> EtherCAT Motion Network</td><td style="width: 35.9362%; text-align: center;"> 15 inch Industrial Touch Panel</td><td style="width: 60.2054%; text-align: center;"> Ethernet </td></tr><tr><td style="width: 14.6759%; text-align: center;"> Siemens </td><td style="width: 33.6405%; text-align: center;"> </td><td style="width: 35.9362%; text-align: center;"> </td><td style="width: 60.2054%; text-align: center;"> CC-Link </td></tr><tr><td style="width: 14.6759%; text-align: center;"> </td><td style="width: 33.6405%; text-align: center;"> </td><td style="width: 35.9362%; text-align: center;"> </td><td style="width: 60.2054%; text-align: center;"> EtherCAT </td></tr></tbody></table></div> ■ 7.안전 시스템    - Laser Safety Cover    - Door Interlock System    - Emergency Stop System    - Fume Exhaust System    - Laser Safety Sensor <hr data-ke-style="style5">