Shimadzu Turbo Molecular Pump TMP-203 Series

<P></P> <H3 class=first>Turbo Molecular Pump</H3> <H4 class=subCateg>Wide-Range Turbo Molecular Pump </H4> <H2 class=transform>TMP-203 Series</H2> <DIV id=intro class=float></DIV> <DIV class=explain> <H4>Standard Specifications</H4> <H5>Pump Main Unit</H5> <P class=article> <TABLE border=1 cellSpacing=0 cellPadding=3 width="100%"> <TBODY> <TR> <TD bgColor=#ebebeb colSpan=2>Turbo molecular pump</TD> <TD bgColor=#ebebeb align=center>TMP-203LM</TD> <TD bgColor=#ebebeb align=center>TMP-203LMC</TD> <TD bgColor=#ebebeb align=center>TMP-203M</TD> <TD bgColor=#ebebeb align=center>TMP-203MC</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Inlet flange</TD> <TD colSpan=4 align=center>VG100 / ICF152 / ISO100B / ISO100C</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Outlet flange</TD> <TD colSpan=4 align=center>KF25</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Cooling method</TD> <TD colSpan=2 align=center>Water</TD> <TD colSpan=2 align=center>Cooling fan</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Ultimate pressure (after baking)<BR>(Note1)</TD> <TD align=center>10<SUP>-8 </SUP>Pa order</TD> <TD align=center>10<SUP>-7</SUP> Pa order</TD> <TD align=center>10<SUP>-8</SUP> Pa order</TD> <TD align=center>10<SUP>-7 </SUP>Pa order</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Maximum allowable inlet pressure<BR>(N<SUB>2</SUB> continuous exhaust)</TD> <TD colSpan=2 align=center>200 Pa</TD> <TD colSpan=2 align=center>1.3 Pa</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Maximum allowable outlet pressure </TD> <TD colSpan=2 align=center>400 Pa</TD> <TD colSpan=2 align=center>40 Pa</TD></TR> <TR> <TD bgColor=#ebebeb rowSpan=3>Pumping speed<BR>(Note 2)</TD> <TD bgColor=#ebebeb>N<SUB>2</SUB></TD> <TD colSpan=4 align=center>190 L/s<BR></TD></TR> <TR> <TD bgColor=#ebebeb>He</TD> <TD colSpan=4 align=center>140 L/s</TD></TR> <TR> <TD bgColor=#ebebeb>H<SUB>2</SUB></TD> <TD colSpan=4 align=center>120 L/s</TD></TR> <TR> <TD bgColor=#ebebeb rowSpan=3>Compression ratio</TD> <TD bgColor=#ebebeb>N<SUB>2</SUB></TD> <TD colSpan=4 align=center>1 x 10<SUP>9</SUP><BR></TD></TR> <TR> <TD bgColor=#ebebeb>He</TD> <TD colSpan=4 align=center>6 x 10<SUP>4</SUP></TD></TR> <TR> <TD bgColor=#ebebeb>H<SUB>2</SUB></TD> <TD colSpan=4 align=center>4 x 10<SUP>3</SUP></TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Rated speed</TD> <TD colSpan=4 align=center>50000 rpm</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Start-up time</TD> <TD colSpan=4 align=center>5 minutes or less</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Mounting position</TD> <TD colSpan=4 align=center>In any desired direction</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Bake-out temperature at an inlet flange</TD> <TD colSpan=4 align=center>120 degrees C. or less</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Vibration level (by Shimadzu's method)</TD> <TD colSpan=4 align=center>0.012 µm or less (0-peak)</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Recommended flow rate of purge gas</TD> <TD colSpan=4 align=center>20 to 30 mL/min (Note 3)</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Recommended pumping speed of backing pump in case of gas purge</TD> <TD colSpan=4 align=center>200 L/min or more</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Environmental Temperatures</TD> <TD colSpan=4 align=center>0 to 40 degrees C.</TD></TR> <TR> <TD bgColor=#ebebeb rowSpan=2>Admissible ambient<BR>magnetic field</TD> <TD bgColor=#ebebeb>Radial direction<BR></TD> <TD colSpan=4 align=center>3 mT<BR></TD></TR> <TR> <TD bgColor=#ebebeb>Axial direction</TD> <TD colSpan=4 align=center>15 mT</TD></TR> <TR> <TD bgColor=#ebebeb rowSpan=3>Water</TD> <TD bgColor=#ebebeb>Flow rate<BR></TD> <TD colSpan=2 align=center>1 to 3 L/min<BR></TD> <TD rowSpan=3 colSpan=2 align=center>-</TD></TR> <TR> <TD bgColor=#ebebeb>Pressure</TD> <TD colSpan=2 align=center>0.2 to 0.5 MPa</TD></TR> <TR> <TD bgColor=#ebebeb>Temperature</TD> <TD colSpan=2 align=center>5 to 30 degrees C.</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Mass</TD> <TD colSpan=4 align=center>9 kg</TD></TR></TBODY></TABLE> <TABLE border=0 cellSpacing=0 cellPadding=3 width="100%"> <TBODY> <TR> <TD vAlign=top noWrap>(Note 1)</TD> <TD vAlign=top>When using a metal gasket at the inlet flange. When using an o-ring gasket, the ultimate pressure is 10<SUP>-7</SUP> Pa order.</TD></TR> <TR> <TD vAlign=top noWrap>(Note 2)</TD> <TD vAlign=top>Without a protective net. Pumping speed for N<SUB>2</SUB> is 180 L/s with a protective net.</TD></TR> <TR> <TD vAlign=top noWrap>(Note 3)</TD> <TD vAlign=top>mL/min : volume flow rate at 0 degrees C., 1 atm. (compatible with SCCM.)</TD></TR></TBODY></TABLE><BR> <P></P></DIV> <DIV class=explain> <H5>Power Supply Unit</H5> <P class=article> <TABLE border=1 cellSpacing=0 cellPadding=3 width="100%"> <TBODY> <TR> <TD bgColor=#ebebeb colSpan=2>Power supply unit</TD> <TD bgColor=#ebebeb align=center>EI-S04M</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Battery</TD> <TD align=center>Not Necessary</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Exchangeable compatibility</TD> <TD>The control cable and the fan cable are interchangeable between any pump and power supply unit.</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Speed variation</TD> <TD>Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %)</TD></TR> <TR> <TD bgColor=#ebebeb rowSpan=2>Communication</TD> <TD bgColor=#ebebeb>Contact</TD> <TD>REMOTE (MR-34)<BR> <TABLE border=0 cellSpacing=0 cellPadding=0> <TBODY> <TR> <TD vAlign=top>Input</TD> <TD vAlign=top>:</TD> <TD vAlign=top>START / STOP / RESET / LOW SPEED</TD></TR> <TR> <TD vAlign=top>Output</TD> <TD vAlign=top>:</TD> <TD vAlign=top>ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING</TD></TR></TBODY></TABLE></TD></TR> <TR> <TD bgColor=#ebebeb>Serial</TD> <TD> <TABLE border=0 cellSpacing=0 cellPadding=0> <TBODY> <TR> <TD vAlign=top noWrap>Front panel</TD> <TD vAlign=top>:</TD> <TD vAlign=top>RS-232C (D-sub 9 pin male, Screw lock size : M2.6)</TD></TR> <TR> <TD vAlign=top noWrap>Rear panel</TD> <TD vAlign=top>:</TD> <TD vAlign=top>RS-485 (D-sub 9 pin female, Screw lock size : M2.6)</TD></TR></TBODY></TABLE></TD></TR> <TR> <TD bgColor=#ebebeb rowSpan=2>Environmental conditions</TD> <TD bgColor=#ebebeb>Temperature</TD> <TD align=center>Operation 0 to 45 degrees C. (No dew condensation)</TD></TR> <TR> <TD bgColor=#ebebeb>Relative humidity</TD> <TD align=center>40 to 80 %RH</TD></TR> <TR> <TD bgColor=#ebebeb rowSpan=3>Input electric power</TD> <TD bgColor=#ebebeb rowSpan=2>Voltage</TD> <TD align=center>Single phase 100 to 120 VAC ± 10 % (50/60 Hz ± 2 Hz)</TD></TR> <TR> <TD align=center>Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz)</TD></TR> <TR> <TD bgColor=#ebebeb>Maximum power</TD> <TD align=center>450 VA</TD></TR> <TR> <TD bgColor=#ebebeb colSpan=2>Mass</TD> <TD align=center>8 kg</TD></TR></TBODY></TABLE> <P></P></DIV> <DIV class=explain> <P class=article><BR></P></DIV>