The SierraTherm 5500 Series Atmospheric Pressure Chemical Vapor Deposition (APCVD) system is designed specifically for applying precision CVD thin film coatings such as Tin Oxide, Titanium Oxide, and Silicon Oxide.Typical applications include coatings for Solar Cells, LCD Displays, Flash Tubes, CRT Displays, Heating Elements, Silicon Wafers, plus many more.
High deposition rates for very high production rates.
Continuous conveyorized process for excellent stability and repeatability.
Excellent uniformity on substrates as large as 48 inches wide.
Multiple coatings in a single pass with up to 4 in-line coating chambers.
Lower cost and higher throughput over batch-type vacuum systems.
Semiconductor quality cleanliness
Included as standard equipment on the 5500 Series is the powerful and convenient Windows-based MicroTherm PC control, profiling, and monitoring system, first developed and introduced by SierraTherm in 1992.
TYPICAL APCVD FILM APPLICATIONS
APPLICATION
SUBSTRATE
THIN FILM
FILM PROPERTIES
Transparent Conductive Oxide LDC’s, Solar Cells, Flashtubes, Heating Systems
Glass (BSG, Soda-Lime)
SnO2-F
Bulk Resistivity: <600 micro-ohm-cm. Sheet resistance to 10 ohms/sq. greater then 85% Optical Transmission
Anti-Static Films
Glass
SnO2
5-100 k-ohms/sq. clear, color-less below 400 A
Barrier Undercoat
Soda-Lime Glass
SiO2
In-line barrier pre-coat for SnO2, 250A to 2500A
Insulator
Glass, Silicon Wafer
SiO2
Applications from 500A to 2500A
Anti-Reflective Layer
Reflective Layer
Glass, Silicon Wafer
TiO2
2% Refractive index uniformity
PROCESS PRECURSORS
Tin oxide (SnO2)
Tintetrachloride (SnC14), H2O Fluorine doping from an environmental safe Freon compound
Silicon oxide (SiO2)
Silane, Oxygen
Titanium oxide (TiO2)
Tetraisopropyltitinate (TPT), H2O
OPTIONS
Air Purifier System
440/480 Volt Transformers
Profiling Thermocouples
Belt Stop Alarm System
Element Fail Detection
Brush Belt Cleaners
Ultrasonic Belt Cleaning Systems
Mass Flow Control Chemical Delivery System
Atmosphere Analyzers
Chemical Safety Systems
Printers and Plotters
UPS for Computer and Belt Drive System
Light Tower
Heating Element Top to Bottom Power Trimming
OPC Server for Network Monitoring and Data Logging